| 发明名称 |
REMOTE MONITORING SYSTEM FOR CHEMICAL LIQUID DELIVERY |
| 摘要 |
A system and method for remote monitoring one or more liquid chemical delivery systems and tools associated with semiconductor fabrication includes a computer interface (12) linkiong a delivery system (14) and tool (16) to a computer (20). Sensors (22, 24) provide information such as temperature, pressure, liquid level, leakage and the presence of spills. |
| 申请公布号 |
WO03088314(A2) |
申请公布日期 |
2003.10.23 |
| 申请号 |
WO2003US10874 |
申请日期 |
2003.04.09 |
| 申请人 |
ARCH SPECIALTY CHEMICALS, INC. |
发明人 |
BLATT, CHRISTOPHER;NAYFAH, MUSTAFA;WOLFE, DAN;CLEEMPUT, MARC, VAN |
| 分类号 |
H01L21/02;C23C16/448;C23C16/52;G06F11/00;G06F15/00;H01L21/00 |
主分类号 |
H01L21/02 |
| 代理机构 |
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