Thin film structure sputter mask - with thin structuring mask and receding thick supporting mask

摘要

A mask to produce electronic modules by a plane sputtering process, consists of a first thin structuring mask which defines the contours of the desired structure. The slope of the second thicker mask which has a supporting purpose is kept to a distance from the slope of the first, which governs by its ratio to the thickness of the second mask the slope of the edges of the stucture. This arrangement provides a fine control of the slope of the edges of thin-film structures, e.g. a flat slope with a rounded top corner and a plane top surface.