发明名称 Cleaning apparatus having fluid mixing nozzle for manufacturing flat-panel display
摘要 Provided is a cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus having a fluid mixing nozzle, the cleaning apparatus for cleaning a glass plate used in the manufacture of a flat-panel display and which mixes a cleaning fluid with a gas and sprays the mixture uniformly on the entire surface of a glass plate, thereby providing superior cleaning effects with a minimum amount of cleaning fluid. The fluid mixing nozzle includes a nozzle in the shape of a rectangle, which mixes a cleaning fluid and a pressured gas and sprays a mixture on the flat-panel display. By tightening the nozzle in a direction of the short axis of the nozzle with use of streamlined structures at a predetermined interval, it is possible to prevent a gap of the nozzle from being elastically deformed. Even with a small amount of cleaning fluid, it is possible for the mixture to be sprayed uniformly on the entire surface of the flat-panel display and for the cleaning effects of a glass plate used in manufacturing the flat-panel display to be improved.
申请公布号 US2003196689(A1) 申请公布日期 2003.10.23
申请号 US20030413556 申请日期 2003.04.15
申请人 DISPLAY MANUFACTURING SERVICE CO. , LTD. 发明人 LEE SOK-JOO;PARK GI-BUM
分类号 B08B3/02;H01J9/38;(IPC1-7):B08B3/00 主分类号 B08B3/02
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