High density substrate for the packaging of integrated circuits

摘要

A package for mounting an integrated circuit die. In one embodiment the package comprises a metal substrate having first and second primary opposed surfaces and an aperture formed therebetween. A flexible thin film interconnect structure having bottom and top opposing surfaces is formed over the first primary surface of the metal substrate and over the aperture such that a first region of the bottom surface is in direct contact with the first surface of the metal substrate and a second region of the bottom surface is opposite the aperture. Within the second region of the bottom surface are a first plurality of exposed bonding pads having a first pitch appropriate for attaching the integrated circuit die to package. The top surface of the flexible thin film interconnect structure includes a second plurality of exposed bonding pads having a pitch greater than the first pitch.