| 摘要 |
<p>A system and a method for forming a DLC film on the inner surface of a plastic container in order to prevent the rate of operation of the DLC film forming system from lowering due to foreign matters adhering to an inner electrode. The system for forming a DLC film on the inner surface of a plastic container is characterized by comprising an inner electrode part comprising an outer electrode arranged to surround the vicinity of the outside of the plastic container and an inner electrode arranged in the plastic container in relative insertion/removal relation therewith, means for introducing material gas into the plastic container, a matching unit connected with the outer electrode, a high frequency power supply connected with the matching unit, and a cleaning section provided with a furnace chamber for removing foreign matters adhering to the inner electrode by combusting/decomposing them in relative insertion/removal relation with the inner electrode.</p> |
