发明名称 Mercury-containing copper oxide superconductor film, manufacturing apparatus thereof and manufacturing process thereof
摘要 The objective of this invention is to provide a mercury-containing copper oxide superconductor film with a large area and a reduced amount of hetero-phase precipitate as an impurity, as well as an apparatus and a process for safely producing the film in a large scale; for this purpose, an apparatus for forming a film of this invention comprises a pressure vessel 1 (pressurized atmosphere furnace) equipped with a port 11 for introducing an external gas atmosphere to the furnace wall 3 and a mercury feeder 10 for controlling a pressure of the gas atmosphere independently of the pressure vessel 1 by generating a mercury-containing gas, the mercury feeder 10 introduces a mercury-containing gas into the pressure vessel 1 via the port 11, and, there is a metal seal gate valve 16 between the pressure vessel 1 and the mercury feeder 10.
申请公布号 US2003197155(A1) 申请公布日期 2003.10.23
申请号 US20020191894 申请日期 2002.07.09
申请人 NEC CORPORATION 发明人 HATTORI WATARU
分类号 C01G1/00;C23C10/02;C23C10/06;C23C14/08;C23C14/58;C30B23/02;G01K7/00;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):C23C16/00;H01C1/00 主分类号 C01G1/00
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