PROJECTION OPTICAL SYSTEM, EXPOSURE SYSTEM AND EXPOSURE METHOD

摘要

An projection optical system having good optical features without being substantially affected by double refraction even when a crystal material showing an intrinsic double refraction such as fluorite is used. The projection optical system includes a crystal transmitting member formed of a crystal material to form an image on a first plane (R) onto a second plane (W). A light transmitting phase correcting member (PC) is provided for correcting the phase difference between mutually orthogonal polarization components produced due to a crystal transmitting member. The phase correcting member is formed of a uniaxial crystal with its optical axis almost agreeing with the optical axis (AX1) of an optical system.