METHOD FOR FABRICATING COIL TYPE LIQUID METAL ION SOURCE INCLUDING LIQUEFIED METAL SUPPLY PATH

摘要

PURPOSE: A method for fabricating a coil type liquid metal ion source including a liquid metal supply path is provided to generate stably ion beams by controlling the supply of the liquid metal. CONSTITUTION: An emitter(3) is etched by performing an electrochemical etching process. The emitter(3) including a liquid metal supply path is fabricated by etching the emitter(3). A coil type liquid metal storage tank(7) is provided. The liquid metal is transferred from a high vacuum chamber to the coil type liquid metal storage tank(7). The coil type liquid metal is formed with Gallium. The coil type liquid metal storage tank(7) is fabricated by tungsten filament. The emitter(3) is fabricated by tungsten wire. The electrochemical etching process includes a preliminary etching process, a pointing etching process, and a blunting etching process.