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发明名称
REACTION CHAMBER FOR AN EPITAXIAL REACTOR
摘要
申请公布号
EP1173632(B1)
申请公布日期
2003.10.22
申请号
EP20000920507
申请日期
2000.03.17
申请人
LPE SPA
发明人
PRETI, FRANCO;OGLIARI, VINCENZO;TARENZI, GIUSEPPE
分类号
C23C16/44;C30B25/14;H01L21/205;(IPC1-7):C30B25/14
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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