INTERLOCK SYSTEM AND METHOD FOR PREVENTING MALFUNCTION OF THE SAME

摘要

PURPOSE: An interlock system and a method for preventing the malfunction of the same are provided to be capable of compulsorily operating the interlock system. CONSTITUTION: An interlock system is provided with at least one semiconductor manufacturing equipment(100), at least one equipment controlling server(200) is connected to each semiconductor manufacturing equipment, and a control server(300) connected to all the equipment controlling servers for selectively controlling each equipment controlling server. At this time, the equipment controlling server outputs measurement data, wherein the measurement data include equipment data corresponding to the semiconductor manufacturing equipment and process data corresponding to a predetermined process. Preferably, the control server commands the equipment controlling server to block the progress of the predetermined process when an interlock specification corresponding to the predetermined process is undetermined.