发明名称 Strained fin FETs structure and method
摘要 A method and structure for a transistor that includes an insulator and a silicon structure on the insulator. The silicon structure includes a central portion and Fins extending from ends of the central portion. A first gate is positioned on a first side of the central portion of the silicon structure. A strain-producing layer could be between the first gate and the first side of the central portion of the silicon structure and a second gate is on a second side of the central portion of the silicon structure.
申请公布号 US6635909(B2) 申请公布日期 2003.10.21
申请号 US20020101807 申请日期 2002.03.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CLARK WILLIAM F.;FRIED DAVID M.;LANZEROTTI LOUIS D.;NOWAK EDWARD J.
分类号 H01L21/336;H01L29/10;H01L29/786;(IPC1-7):H01L31/032;H01L31/033 主分类号 H01L21/336
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