发明名称 Manufacturing method and manufacturing apparatus of image displaying apparatus
摘要 An image display appratus is manufactured by processing a panel member through a plurality of chambers including ones for a bake processing and a getter processing. The getter processng is performed at a temperature lower than a temperature of the panel member subjected to the bake processing, to prevent degrading of a getter film.
申请公布号 US6634916(B2) 申请公布日期 2003.10.21
申请号 US20010813138 申请日期 2001.03.21
申请人 CANON KABUSHIKI KAISHA 发明人 KANEKO TETSUYA;NAKATA KOHEI;MIYAZAKI TOSHIHIKO
分类号 H01J9/38;H01J9/24;H01J9/26;H01J9/39;H01J9/40;H01J9/46;H01J9/48;H01J29/94;(IPC1-7):H01J9/26 主分类号 H01J9/38
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