发明名称 Methods of forming semiconductor constructions
摘要 The invention includes a method of forming a semiconductor construction. A first substrate is provided which comprises silicon-containing structures separated from one another by an insulative material. The silicon-containing structures define an upper surface. A second semiconductor substrate is provided which comprises a monocrystalline material having a damage region therein. The second semiconductor substrate is bonded to the silicon-containing structures of the first substrate at the upper surface. The monocrystalline material is then cleaved along the damage region. The invention also encompasses a semiconductor construction comprising a first substrate having silicon-containing structures separated from one another by an insulative material, and a second substrate comprising a monocrystalline material. The silicon-containing structures of the first substrate define an upper surface, and the monocrystalline material of the second substrate is bonded over the silicon-containing structures at the upper surface.
申请公布号 US6635552(B1) 申请公布日期 2003.10.21
申请号 US20000592604 申请日期 2000.06.12
申请人 MICRON TECHNOLOGY, INC. 发明人 GONZALEZ FERNANDO
分类号 H01L21/30;H01L21/46;H01L21/762;H01L21/822;H01L21/8238;H01L27/06;H01L27/108;H01L31/00;(IPC1-7):H01L21/30 主分类号 H01L21/30
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