| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus which can prevent the particles once removed from the top surface of a glass substrate from being stuck again to the top surface of the glass substrate. SOLUTION: A box unit 29 provided with a high-pressure jet injector 2 and vacuum nozzles 3, 3 is arranged in a high-pressure jet cleaning part 24 of this substrate cleaning apparatus. Receiving parts 29b of the unit 29 and the nozzles 3, 3 are arranged on the upstream and downstream sides of the injector 2 in the substrate conveying direction, respectively. The particles on the top surface of the glass substrate 1 are removed by a cleaning liquid jetted from the injector 2. The cleaning liquid containing the particles is made to flush into any of the parts 29b of the unit 29 by the injection from the injector 2, which is then sucked by the nozzles 3, 3 and removed from the part 24. COPYRIGHT: (C)2004,JPO
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