发明名称 |
MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same |
摘要 |
MEMS optical switches can include a substrate having first and second opposing faces and at least one side therebetween. An input is obliquely angled towards the face and optically couples optical radiation towards the face. A movable reflector is on the face and moves from a first position to a second position that is parallel to the first position to reflect the optical radiation from the input to provide reflected optical radiation. A output is obliquely angled away from the face and optically couples the reflected optical radiation away from the face.
|
申请公布号 |
US6636655(B2) |
申请公布日期 |
2003.10.21 |
申请号 |
US20010939060 |
申请日期 |
2001.08.24 |
申请人 |
MEMSCAP S.A. |
发明人 |
ZHU TERRY D.;WALTERS MARK |
分类号 |
B81B3/00;G02B6/35;(IPC1-7):G02B6/26;G02B6/42 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|