| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate removing a workpiece from a grinding pad surface after grinding, to decrease a grinding liquid used for grinding, and to reduce a manufacturing cost of a grinding pad. <P>SOLUTION: A first grinding pad 1 grinding the workpiece is provided with a plurality of long holes 11 penetrating the first grinding pad 1 in a thickness direction thereof. Preferably, the length in a longitudinal direction of the long holes 11 is formed to be not more than 20 mm, and the pitch in a width direction of the long holes 11 is made to be less than 100 mm. Small holes (not shown) may be provided in addition to the long holes 11. <P>COPYRIGHT: (C)2004,JPO |
