| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for treating waste water of polishing capable of decreasing membrane areas and reducing an initial cost, running cost and installation area. SOLUTION: The method for treating the waste water of polishing comprises filtering the waste water of polishing by regulating the velocity of permeation flow on the filtrate side of membranes 1 to a constant velocity of flow in treating the waste water of polishing by cross-flow filtration. The membranes 1 are formed to multiple stages and the waste water of polishing is successively passed through the respective membranes 1, by which the waste water of polishing is separated and disposed to the permeated liquid to be recycled and the concentrated liquid to be discarded. COPYRIGHT: (C)2004,JPO
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