发明名称 Semiconductor integrated circuit device
摘要 To improve performance, a capacitor is provided between storage nodes of an SRAM and a device having an analog capacitor on a single substrate, a plug is formed in a silicon oxide film on a pair of n channel type MISFETs in a memory cell forming area, and a local wiring LIc for connecting respective gate electrodes and drains of the pair of n channel type MISFETs is formed over the silicon oxide film and the plug. Thereafter, a capacitive insulating film and an upper electrode are formed over the local wiring LIc.
申请公布号 US6635937(B2) 申请公布日期 2003.10.21
申请号 US20020152615 申请日期 2002.05.23
申请人 HITACHI, LTD. 发明人 OOTSUKA FUMIO;NONAKA YUSUKE;SHIMAMOTO SATOSHI;OMORI SOHEI;KAZAMA HIDETO
分类号 H01L21/768;H01L21/822;H01L21/8244;H01L27/04;H01L27/10;H01L27/11;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/768
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