发明名称 |
Dry surface cleaning apparatus using a laser |
摘要 |
A dry surface cleaning apparatus removes surface contaminants on a surface of a workpiece. The dry surface cleaning apparatus includes a laser for generating a laser beam, a beam delivery control unit for splitting the laser beam into a first and a second laser beam, a frequency modulator for modulating the second laser beam to generate a shorter wavelength laser beam and a laser focusing lens for converging the first laser beam on a laser focus around the surface of the workpiece to generate a plasma shock wave around the laser focus.
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申请公布号 |
US6635845(B2) |
申请公布日期 |
2003.10.21 |
申请号 |
US20020094610 |
申请日期 |
2002.03.12 |
申请人 |
IMT CO., LTD. |
发明人 |
LEE JONG-MYONG;CHO SUNG HO |
分类号 |
B08B7/00;B23K26/06;H01L21/00;(IPC1-7):B23K26/00 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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