摘要 |
<P>PROBLEM TO BE SOLVED: To provide a double-sided grinding device carrier capable of preventing a carrier from hooking to a pin of a carrier holder and being hard to be extracted, and suppressing the generation of ships generated by shaving the pin, by reducing wear of the pin for holding the carrier of the carrier holder; and to provide a double-sided grinding device using the double-sided grinding device carrier. <P>SOLUTION: In order to be held in a ring-shaped carrier holder 22 making a circular motion that does not rotate on its axis in the same surface by a circular motion mechanism 20, through-holes 12b loosely fitted with a plurality of pins 23 raised on the carrier holder 22 are bored along a peripheral edge, and at least the peripheral edge of the through-holes 12b are formed to be thicker than the other part. <P>COPYRIGHT: (C)2004,JPO |