发明名称 DOUBLE-SIDED GRINDING DEVICE CARRIER AND DOUBLE-SIDED GRINDING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a double-sided grinding device carrier capable of preventing a carrier from hooking to a pin of a carrier holder and being hard to be extracted, and suppressing the generation of ships generated by shaving the pin, by reducing wear of the pin for holding the carrier of the carrier holder; and to provide a double-sided grinding device using the double-sided grinding device carrier. <P>SOLUTION: In order to be held in a ring-shaped carrier holder 22 making a circular motion that does not rotate on its axis in the same surface by a circular motion mechanism 20, through-holes 12b loosely fitted with a plurality of pins 23 raised on the carrier holder 22 are bored along a peripheral edge, and at least the peripheral edge of the through-holes 12b are formed to be thicker than the other part. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003300152(A) 申请公布日期 2003.10.21
申请号 JP20020101071 申请日期 2002.04.03
申请人 FUJIKOSHI MACH CORP 发明人 MORIYA NORIHIKO;KANDA TOMOKI;KAJIKURA JUN
分类号 B24B37/08;B24B37/27;B24B37/28;H01L21/304 主分类号 B24B37/08
代理机构 代理人
主权项
地址