摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wear resistant member made of silicon nitride which has a prescribed electric resistance value (electric conductivity) in addition to the high strength and high toughness characteristic of silicon nitride, and has excellent sliding properties in particular, and to provide a production method therefor. <P>SOLUTION: The wear resistant member 2 made of silicon nitride consists of a ceramics sintered compact composed of, by mass, 55 to 75% silicon nitride, 12 to 28% silicon carbide, at least one kind of element selected from Mo, W, Ta and Nb in 3 to 15% expressed in terms of silicide and a 5 to 15% grain boundary phase consisting of rare earth elements-Si-Al-O-N. The wear resistant member 2 made of silicon nitride has an electric resistance value of 10<SP>7</SP>to 10<SP>4</SP>Ωcm, a porosity of ≤1% and a three point bending strength of ≥900 MPa. <P>COPYRIGHT: (C)2004,JPO |