| 摘要 |
PURPOSE:To easily form desired fine patterns having a desired depth distribution by direct plotting by incorporating a light absorber into a photosensitive material to increase the light absorbance of the photosensitive material, then forming the patterns. CONSTITUTION:The laser beam generated from a laser 1 is made incident on a condenser system 7 via an ND filter 2, a half mirror 3, a mirror 5 and a pinhole 6. The laser beam is made incident from the light condensing system 7 on the photosensitive material (dry plate) 9 consisting of a photoresist placed on an X-Y stage 8 and the fine patterns are formed by direct plotting. The dry plate formed by incorporating the light absorbent into the photoresist at a mixing rate meeting its kind to increase the light absorbance of the photoresist is used as the dry plate 9. Dyestuff, carbon powder or a binder material having the high light absorbance in an exposing wavelength region is preferably used as the light absorber. Ketocumarine dyestuff is more preferable as the dyestuff. |
