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发明名称
Plasma etching method and plasma etching device
摘要
申请公布号
AU2003236307(A8)
申请公布日期
2003.10.20
申请号
AU20030236307
申请日期
2003.04.07
申请人
KABUSHIKI KAISHA TOSHIBA;TOKYO ELECTRON LIMITED
发明人
SHOICHIRO MATSUYAMA;MASANOBU HONDA;KAZUYA NAGASEKI;HISATAKA HAYASHI
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
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地址
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