| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To automatically and objectively provide a workpiece rebound sensing device for sensing the rebound of a workpiece. <P>SOLUTION: In this workpiece rebound sensing device wherein the workpiece W is attracted by a static chuck 36 to a platform 34 in a treatment container 4 of a treatment device 2, the rebound of the workpiece W on the platform 34 is sensed when the workpiece W is lifted by a lifter pin 58 from the static chuck 36 after the application of a discharge voltage to the static chuck 36. The device has a discharge detection unit 76 for detecting at least either the discharge current or the discharge voltage induced between the workpiece W and the platform 34 upon the lifting of the workpiece W from the platform 34 and a determination unit 78 for determining the presence/absence of the rebound of the workpiece W. <P>COPYRIGHT: (C)2004,JPO</p> |
