| 摘要 |
PROBLEM TO BE SOLVED: To automatically decide a liquid level in matching liquid. SOLUTION: The liquid level-deciding apparatus decides the liquid level of filling liquid for filling a portion among a plurality of optical components (200, 202). The liquid level-deciding apparatus is equipped with an inspection light-emitting apparatus (260) that nearly vertically emits inspection light to an opposite surface (203) of the optical component (202) for the optical component (202) in a pair of optical components that opposes via the filling liquid (204), a conveyance apparatus (262) that conveys the inspection light emission apparatus (260) for emitting the inspection light to an arbitrary inspection position on the opposite surface, a reflection position specifying apparatus (240) that specifies the reflection position of the inspection light based on the reflection light of the inspection light that is emitted toward the opposite surface (230) from the inspection light-emitting apparatus (260), and a deciding apparatus (264) that decides the presence or the absence of the filling liquid at the inspection position based on the reflection position that is specified by the reflection position specifying apparatus (240). COPYRIGHT: (C)2004,JPO |
