发明名称 MAGNETOMETRIC SENSOR AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a perpendicular-to-surface type magnetometric sensor in which a resist, etc., is made easy to remove, an even upper electrode terminal layer is formed, the sensor is concentrated to the center of a magnetoresistive effect element without damaging a sense current, and a width of reproducing truck is reduced, and to provide a method for manufacturing it. SOLUTION: A magnetometric sensor 100 comprises a lower electrode terminal layer 111, a magnetoresistive effect element 112 formed on the lower electrode terminal layer 111, a magnetic domain control layer 113 formed next to the magnetoresistive effect element 112, an insulation layer 114 formed on a part of the magnetoresistive effect element 112, and an upper electrode terminal layer 15 formed on the magnetoresistive effect element 112 and the insulation layer 114. The upper electrode terminal layer 115 is in contact with a top surface of the magnetoresistive effect element 112 within the compass of the width of the top surface of the magnetoresistive effect element 112 or less, and has a tapered surface that expands toward the upper side. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003298141(A) 申请公布日期 2003.10.17
申请号 JP20020092771 申请日期 2002.03.28
申请人 FUJITSU LTD 发明人 KAMATA SHINGI;EGUCHI SHIN;TANAKA ATSUSHI
分类号 G01R33/09;G11B5/39;H01L43/08;H01L43/12;(IPC1-7):H01L43/08 主分类号 G01R33/09
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