发明名称 PIEZOELECTRIC ACTUATOR AND LIQUID DISCHARGE HEAD
摘要 <P>PROBLEM TO BE SOLVED: To provide a small-sized piezoelectric actuator that is enabled to make high-speed printing while maintaining high gradient by improving the piezoelectric strain constant of the actuator, and to provide a liquid discharge head using the actuator. <P>SOLUTION: The liquid discharge head is provided with a plurality of discharged liquid chambers arranged at prescribed intervals, discharged liquid supply ports which are respectively provided to the discharged liquid chambers to supply a discharged liquid, and injection nozzle holes formed in one side walls of the discharged liquid chambers demarcating the chambers. The head is also provided with diaphragms provided to demarcate the other side faces of the discharged liquid chambers and piezoelectric actuators respectively provided to the diaphragms. Each piezoelectric actuator is provided with electrodes on both surface of a piezoelectric film and the diameters D of crystal grains contained in the texture of the piezoelectric film are adjusted to meet 0.1 &mu;m<D<5 &mu;m. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003298132(A) 申请公布日期 2003.10.17
申请号 JP20020102649 申请日期 2002.04.04
申请人 HITACHI METALS LTD 发明人 KIKUCHI HIROMI;KAGA YOICHIRO;WATANABE JUNICHI
分类号 B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L41/08;H01L41/09;H01L41/187;H01L41/22;H01L41/314 主分类号 B41J2/045
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