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发明名称
EQUIPMENT FOR PLASMA PROCESS
摘要
申请公布号
KR20030081074(A)
申请公布日期
2003.10.17
申请号
KR20030021933
申请日期
2003.04.08
申请人
发明人
分类号
H05H1/46;C23C16/511;H01J37/32;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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