| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laser oscillator in which there is no need for cleaning with respect to a mirror contamination of a laser oscillator to obtain a stable beam mode characteristic, and to obtain a cleaning method. SOLUTION: The laser oscillator excites a laser medium, reflects and amplifies emitted lights between optical parts to output predetermined laser beams. The laser oscillator comprises a pressurization part for airtightly, solely holding the optical parts, a cleaning gas supply means for supplying a cleaning gas to the inside of this pressurization part, and a gas control means for controlling the cleaning gas supplied by this cleaning gas supply means at a predetermined pressure and temperature. The optical parts are cleaned by utilizing superfluidity of the cleaning gas. COPYRIGHT: (C)2004,JPO
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