| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration proof-type magnetic shield clean room where clean precision, magnetic shield performance and vibration proof performance can be secured by fixing a device base by adopting a panel structure and to provide an operating method of the room. SOLUTION: The vibration proof-type magnetic shield clean room is provided with a base 15 which is arranged on an installation base 13 to which a level adjusting mortar 12 is hammer-set and substrate materials 10 on which magnetic materials 17 are arranged at least on one face are laminated, with a concrete floor 20, with a side wall 2 in which panel materials 11 where magnetic materials 23 are stuck to one face are laminated, with a ceiling part 4 where panel materials 11 in which magnetic materials 23 are stuck to at least one face are laminated, with a ULPA filter 72 hung from the ceiling part and with a magnetic ventilation duct 5 having the device base installed on the concrete floor by vibration proof and a magnetic honeycomb in a vent opening. COPYRIGHT: (C)2004,JPO
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