发明名称 MOS TYPE VARIABLE CAPACITANCE ELEMENT AND INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To provide an MOS type variable capacitance element having a variable range broader than a conventional one, and an integrated circuit which mounts thereon an oscillation circuit employing the element, without raising costs. SOLUTION: The MOS type variable capacitance element consists of; a planar capacitive region which is formed on the surface of a first conductive type semiconductor substrate and extended in a first direction; and a capacitive electrode which is formed opposite to the capacitive region with a capacitive insulating film being interposed therebetween to form an MOS capacitance. An impurity diffusion region of a second conductive type which is different from the first conductive type is provided along at least one of the two sides extended to the first direction of the capacitive region. Thus, a significant improvement is achieved in the variance width of a capacitance value with respect to the variation of control signal voltage impressed on the capacitive electrode. Accordingly, a frequency variable oscillator which is constituted by using the MOS type variable capacitance element enables changing of an oscillation frequency over a wide range. COPYRIGHT: (C)2004,JPO
申请公布号 JP2003297940(A) 申请公布日期 2003.10.17
申请号 JP20020132120 申请日期 2002.03.29
申请人 KAWASAKI MICROELECTRONICS KK 发明人 TAKEYASU NOBUYUKI;KUNO ISAMU;ARIYOSHI RYUJI
分类号 H01L27/04;H01L21/822;(IPC1-7):H01L21/822 主分类号 H01L27/04
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