| 摘要 |
PROBLEM TO BE SOLVED: To solve problems that a structure is complicated and a gas hole whose effective diameter is small. SOLUTION: In an electrode plate for a plasma treatment device, an upper electrode 23 includes a cooling plate 34 and an electrode plate 36. The electrode plate 36 has a plurality of grooves 43 wherein sockets 44 made of resins or the like are accommodated. Screw holes 44A are formed in the sockets 44, and the cooling plate 34 and the electrode 36 are joined by screwing screws 42 into the screw holes 44A. COPYRIGHT: (C)2004,JPO
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