| 摘要 |
PROBLEM TO BE SOLVED: To enable to check and supply the material by making only the cell chamber in atmospheric pressure after closing the vacuum valve while the inside of the chamber is kept in vacuum state, and thereby to replace the material without loss of time. SOLUTION: The cell chamber 7 for an organic EL film material is constructed independently from the chamber through a vacuum valve 12. Thereby, it becomes possible to replace the material while the inside of the chamber is kept in vacuum state, thus the loss of time that was necessary for replacement of the material is greatly reduced. COPYRIGHT: (C)2004,JPO
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