发明名称 PRECISE POSITION CONTROL APPARATUS AND METHOD USING OPTICAL SYSTEM
摘要 PURPOSE: A precise position control apparatus and a method using an optical system are provided to be capable of obtaining a precise position control value. CONSTITUTION: A precise position control apparatus is provided with a control unit(214) for controlling the travel of a moving body, an optical system for generating image signal by photographing the moving body, and a monitor(212) for outputting the image signal on a screen. At this time, the control unit obtains the first distance corresponding to a unit pixel by detecting the moving distance of the moving body and the number of pixels of the screen corresponding to the moving distance. When moving the moving body to a predetermined position, the control unit is capable of controlling the travel of the moving body by obtaining the second distance to the predetermined position using the first distance per the unit pixel.
申请公布号 KR20030080684(A) 申请公布日期 2003.10.17
申请号 KR20020019440 申请日期 2002.04.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 OH, JONG HAN;KIM, MIN SU
分类号 G01B11/00;G01R31/28;G05D3/12;G06T1/00;G06T7/00;H01L21/00;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01B11/00
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