发明名称 AUTOMATIC MATCHING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an automatic matching device which matches to a load in all area of the Smith chart, is small in size and is controlled easily, by a matching method using lumped constant circuit elements as a matching device in place of a matching device using stubs. <P>SOLUTION: In the matching device, high frequency voltage detectors are provided to at least 3 connection points of connection points of plural sections in a first lumped constant circuit of plural parallel capacitors and plural series inductances, and a second lumped constant circuit including parallel fixed capacitors, parallel variable reactances and series inductances, are connected to the load side closer to a connection point of the load side. An impedance when the load side is viewed from the second lumped constant circuit is calculated based on output voltages at the connection points in the first lumped constant circuit, matching conditions to the load impedance at the time are found, and the parallel variable reactances of the second lumped constant circuit is adjusted for matching. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003298378(A) 申请公布日期 2003.10.17
申请号 JP20020102240 申请日期 2002.04.04
申请人 NIHON KOSHUHA CO LTD 发明人 SHINOHARA KIBATSU
分类号 H05H1/46;H01L21/205;H01L21/3065;H01P5/02;H03H7/40 主分类号 H05H1/46
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