| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element having a stable high piezoelectric characteristic and to provide a liquid discharge head using the element. <P>SOLUTION: A piezoelectric thin film 43 having a degree of (100)-face orientation of ≥70%, a degree of (110)-face orientation of ≤10%, and the balance degree of (111)-face orientation, with the degrees being measured by the X-ray diffraction wide-angle method, is formed with high reproducibility by successively laminating a lower electrode 42 (containing Ir), a Ti layer having a thickness of 4-6 nm, the piezoelectric film 43, and an upper electrode 44 upon a ZrO<SB>2</SB>film 32 and adjusting the humidity in the forming environment of the piezoelectric film 43 to <30% Rh. <P>COPYRIGHT: (C)2004,JPO |
