| 摘要 |
PROBLEM TO BE SOLVED: To make the rate of film forming highly precise. SOLUTION: A partition 11 which has a function of controlling the area of the opening part of the discharge port is provided at the discharge port 10 of the vapor of the organic EL film material. The organic EL film material in the cell is heated at the optimal temperature condition and at the same time the rate of film forming is controlled precisely. The opening part of the partition is controlled while monitoring the rate of film forming. COPYRIGHT: (C)2004,JPO
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