| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus which can clean the whole interior of a vacuum container to be cleaned throughout without need of human efforts. SOLUTION: An antenna 34 is provided within a vacuum container 28 to be cleaned in advance, a gas is introduced into this vacuum container 28, high- frequency power 38 having a frequency almost equal to a resonance frequency inherent in the vacuum container 28 is supplied to the antenna 34 from a high- frequency power source 36 to ionize the gas by the high-frequency power 38, thereby generating plasma 44 within the vacuum container 28, and the interior of the vacuum container 28 is cleaned with this plasma 44. COPYRIGHT: (C)2004,JPO
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