DRYING EQUIPMENT AND DRYING METHOD FOR INCREASING MARANGONI EFFECT

摘要

PROBLEM TO BE SOLVED: To provide drying equipment for a semiconductor substrate for increasing a Marangoni effect.

SOLUTION: The drying equipment comprises a chamber receiving a gas distributor 15 and a liquid storage tank 3a, and a liquid fluidity system for providing the fluidity of liquid in the liquid storage tank for cleaning a semiconductor substrate and discharging the liquid from the liquid storage tank. The gas distributor is disposed in the upper section of the chamber in order to jet gas for drying the semiconductor substrate, and the liquid storage tank is disposed in the lower section of the chamber. The chamber is provided, at the upper section thereof, with a plurality of exhaust holes 11a for discharging gas fed into the chamber.

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