APPARATUS FOR INSPECTING OPTICAL PARTS BY USING SHEAR INTERFERENCE

摘要

PURPOSE: An optical part inspecting apparatus is provided to improve reliability of measuring result when inspecting optical parts by measuring property of optical parts using shear interference. CONSTITUTION: An optical part inspecting apparatus includes a beam splitter(13). The beam splitter(13) reflects a part of light passing through an optical part(10) and allows remaining paths of light to pass through. Light reflected from the beam splitter(13) is guided into first and second reflection surfaces(15a,16a) and is reflected. The first and second reflection surfaces(15a,16a) have different gradient from each other. The first reflection surface(15a) is formed in a first prism(15) and the second reflection surface(16a) is formed in a second prism(16). The first prism(15) and the second prism(16) are wedge-type prisms. First light and second light reflected from the first and second reflection surfaces(15a,16a) form an interference pattern(20).