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发明名称
摘要
申请公布号
JPS58178113(U)
申请公布日期
1983.11.29
申请号
JP19820073484U
申请日期
1982.05.21
申请人
发明人
分类号
H01S3/101;G02F1/29;H01L21/027;H01L21/30;H01S3/00;(IPC1-7):G02F1/29
主分类号
H01S3/101
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代理人
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