| 摘要 |
PROBLEM TO BE SOLVED: To obtain a positioner which is capable of highly precise positioning by obtaining an electromagnet large in an attraction force, high in the resolution of the attraction force to a command current, and small in heat release value. SOLUTION: In this positioner which positions a subject for positioning using the attraction force or resiliency of the electromagnet, the electromagnet 1 has a core 2 and at least two coils 3 and 4 different in the number of times of windings wound on one core. COPYRIGHT: (C)2004,JPO |
