APPARATUS AND METHOD FOR SINGLE-WAFER-PROCESSING TYPE CVD,申请号KR20030023082-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	APPARATUS AND METHOD FOR SINGLE-WAFER-PROCESSING TYPE CVD
摘要
申请公布号	KR20030081177(A)	申请公布日期	2003.10.17
申请号	KR20030023082	申请日期	2003.04.11
申请人		发明人
分类号	H01L21/205;C23C16/44;C23C16/455;C23C16/458;C23C16/54;H01L21/285;H01L21/3065	主分类号	H01L21/205
代理机构		代理人
主权项
地址

您可能感兴趣的专利

MANUFACTURE OF SEMICONDUCTOR DEVICE

INFORMATION PROCESSING SYSTEM

GRINDING JIG FOR THIN FILM HEAD

INDRETNING TIL FASTGOERELSE AF GENSTANDE, ISAER I EN VAEG SKJULTE TILSLUTNINGSSTYKKER FOR BRUGSVANDARMATURER ELLER ROERLEDNINGER

SEALS FOR GAS ISOLATORS

Edge beam for bridges - is made of components which are installed separately from duct in which services are laid

VERFAHREN SOWIE VORRICHTUNG ZUR BERUEHRUNGS-BZW. KONTAKTLOSEN MESSUNG

Device for the stationary braking of an electric power tool fitted with an angular gear

Device for holding semiconductor wafers

ELEMENTOS DE COFRAGENS INDEPENDENTES E INTERLIGAVEIS PARA A FORMACAO DE PAREDES E OUTRAS CONSTRUCOES E PROCESSO BASEADO NA SUA UTILIZACAO

VASCULAR MAGNETIC IMAGING METHOD AND AGENT

ENCAPSULATED HUMECTANT

IMPROVED METHOD FOR DETERMINING SIALIC ACID IN PLASMA

BREATH SOBRIETY TEST CIRCUMVENTION DETERENCE

REDUCED POWER SWITCH

GAMMA INULIN COMPOSITIONS

A METHOD FOR THE REGISTERING OF THE DRIVING PATTERN OF A MOTOR VEHICLE, AND AN APPARATUS IN THE FORM OF AN INTERVAL COUNTER FOR CARRYING OUT THE METHOD