发明名称 PROCESS MANAGING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To realize stable operation in a production process without causing excessive production. <P>SOLUTION: A process managing method includes a step (S100) which stores a production variation process and a planned non-defective rate; a step (S112) which detects processes in process and the number in process for every lot; a step (S124) which computes the number of non-defective products for every lot based on the number of loadings for every lot and a rate different from the planned non-defective rate for the lots before the production variation process, and computes the number of non-defective products based on the loadings for every lot and the planned non-defective rate for the lots after the production variation process, and then computes a predicted number of non-defective products which is the total of the numbers of these non-defective products; and a step (S130) which computes the number of the loadings additionally loaded to the production process based on the predicted number of the non-defective products thus computed. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2003295930(A) 申请公布日期 2003.10.17
申请号 JP20020098883 申请日期 2002.04.01
申请人 MITSUBISHI ELECTRIC CORP 发明人 ICHIKAWA YOSHIMASA
分类号 G05B19/418;G06Q50/00;G06Q50/04;H01L21/02;(IPC1-7):G05B19/418;G06F17/60 主分类号 G05B19/418
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