发明名称 |
Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
摘要 |
Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm <bold>60 </highlight>of a substrate or wafer holder <bold>180</highlight>, in at least two generally orthogonal directions (so-called X-Y scanning). Scanning in a first direction is longitudinally through an aperture <bold>55 </highlight>in a vacuum chamber wall. The arm <bold>60 </highlight>is reciprocated by one or more linear motors <bold>90</highlight>A, <bold>90</highlight>B. The arm <bold>60 </highlight>is supported relative to a slide <bold>100 </highlight>using gimballed air bearings so as to provide cantilever support for the arm relative to the slide <bold>100</highlight>. A compliant feedthrough <bold>130 </highlight>into the vacuum chamber for the arm <bold>60 </highlight>then acts as a vacuum seal and guide but does not itself need to provide bearing support. A Faraday <bold>450 </highlight>is attached to the arm <bold>60 </highlight>adjacent the substrate holder <bold>180 </highlight>to allow beam profiling to be carried out both prior to and during implant. The Faraday <bold>450 </highlight>can instead or additionally be mounted adjacent the rear of the substrate holder or at 90° to it to allow beam profiling to be carried out prior to implant, with the substrate support reversed or horizontal and out of the beam line.
|
申请公布号 |
US2003192474(A1) |
申请公布日期 |
2003.10.16 |
申请号 |
US20020119290 |
申请日期 |
2002.04.10 |
申请人 |
SMICK THEODORE H.;ROBERTS FRANK D.;FARLEY MARVIN;RYDING GEOFFREY;SAKASE TAKAO;MURRELL ADRIAN;EDWARDS PETER;HARRISON BERNARD |
发明人 |
SMICK THEODORE H.;ROBERTS FRANK D.;FARLEY MARVIN;RYDING GEOFFREY;SAKASE TAKAO;MURRELL ADRIAN;EDWARDS PETER;HARRISON BERNARD |
分类号 |
H01J37/04;H01J37/18;H01J37/317;H01L21/265;H01L21/68;(IPC1-7):B05C5/00 |
主分类号 |
H01J37/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|