发明名称 AN ATMOSPHERIC PRESSURE PLASMA ASSEMBLY
摘要 <p>An atmospheric plasma generation assembly (100) having a body (17) containing a reactive agent introducing means, a process gas introducing means and one or more multiple parallel electrode arrangements adapted for generating a plasma. Each electrode arrangement having at least one partially dielectric coated electrode (3, 4) said assembly being adapted such that the only means of exit for a process gas and atomised liquid or solid reactive agent introduced into said assembly is through the plasma region (6) between the aforementioned electrodes (3, 4). The assembly is adapted to move relative to a substrate (1) substantially adjacent to the aforementioned electrodes outermost tips (23). The assembly may also comprise an extractor unit surrounding the plasma generating assembly, comprising an extractor body (8) which is adapted to isolate the assembly from external atmosphere and provide a means of removing exhaust process gas, reactive agents and by-products.</p>
申请公布号 WO2003085693(P1) 申请公布日期 2003.10.16
申请号 EP2003004345 申请日期 2003.04.08
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