ACOUSTIC SURFACE WAVE COMPONENT

摘要

The invention relates to an acoustic surface wave component, in which interdigital converter structures and reflector structures made of an electrically conductive material are arranged on a piezoelectric substrate. The aim of the invention is to provide measures for a surface wave component of this type with which the acoustomigration is significantly reduced, it is possible to shift frequencies to higher values, and inexpensive, pyroelectric substrates can be used without substantially impairing the transmission properties and the important temperature coefficients. The inventive acoustic surface wave component is characterized in that a 1 nm to 20 nm-thick layer, which is made of a diamond-like carbon having an sp3 proportion of > 30 % or made of another material having a modulus of elasticity of at least 200 GPa, is provided on and/or underneath the interdigital converter structures and reflector structures. Said layer is produced using a pulsed high-current arc method or another layer deposition method in order to create diamond-like carbon layers having a comparable sp3 proportion or to create other layers having moduli of elasticity in the area of at least 200 GPa.