Sensor device for determining the layer thickness of a thin layer

摘要

To provide a sensor device for determining the layer thickness of a thin layer of an electrically conducting or semiconducting material which can be used in a simple and low-cost way, it is proposed that the said sensor device comprises one or more inductive proximity sensors which can be positioned at a distance from the layer, an inductive proximity sensor having an oscillator with a frequency which is adapted with respect to the material and the thickness range of the layer to be measured.