发明名称 Optical switching matrix and method of fabricating such a matrix
摘要 An optical switching matrix, made from a semiconductor-D dielectric-based substrate, comprising: at least one set of optical input fibers (<bold>12</highlight>) and at least one set of optical output fibers (<bold>14</highlight>) oriented substantially perpendicular to each other, a set of moveable mirrors (<bold>5, 13</highlight>) placed at the intersections of the directions defined by the various optical fibers, each mirror (<bold>13</highlight>) being capable of moving in order to reflect a beam coming from an optical input fiber, bound for an optical output fiber, a set of channels defined between the mirrors, inside which the various beams are propagated before and after having encountered the mirrors, in which: the set of mirrors is made on a first substrate wafer (<bold>2</highlight>), said first wafer being covered with a second substrate wafer (<bold>20</highlight>), the various channels (<bold>38</highlight>) are formed between protruding zones (<bold>34</highlight>) present under the second substrate wafer, said protruding zones comprising housings (<bold>33</highlight>) inside which the moveable mirrors are able to move.
申请公布号 US2003194172(A1) 申请公布日期 2003.10.16
申请号 US20030391336 申请日期 2003.03.18
申请人 MEMSCAP 发明人 KHALIL DIAA;MADKOUR KAREEM;SAADANY BASSAM;BADRELDIN TAREK;HELIN PHILIPPE
分类号 G02B26/08;B81B3/00;B81B7/04;G02B5/08;G02B6/35;(IPC1-7):G02B6/35 主分类号 G02B26/08
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