摘要 |
A synthetic quartz glass for optical use, to be used by irradiation with light within a range of from the ultraviolet region to the vacuum ultraviolet region, which contains fluorine, which has a ratio of the scattering peak intensity of 2250 cm<superscript>-1 >(I<subscript>2250</highlight>) to the scattering peak intensity of 800 cm<superscript>-1 >(I<subscript>800</highlight>), i.e. I<subscript>2250</highlight>/I<subscript>800</highlight>, of at most 1x10<superscript>-4 >in the laser Raman spectrum, and which has an absorption coefficient of light of 245 nm of at most 2x10<superscript>-3 >cm<superscript>-1>.
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